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Two More Leading Semiconductor Manufacturers Select Brooks-PRI 300mm Software As Their Standard

CHELMSFORD, MA-December 16, 2002-Brooks-PRI Automation, Inc. (NASDAQ: BRKS), which delivers total automation for semiconductor manufacturing, announced today that two more semiconductor manufacturers have selected Brooks-PRI software as their standard for 300mm fabs, bringing the total number of 300mm fabs specifying CCS test products to six, and the number of fabs using CCS test products to twelve.

Both fabs selected Brooks-PRI's Certification Control System (CCS) software - called CCS EnvoyTM - as their standard software for ensuring process tool compatibility with SEMI standards, and in fact have specified the use of CCS Envoy in their contracts with OEM process tool manufacturers.

CCS Envoy helps ensure that process tools are SEMI-standard compliant before they arrive at the fab. Often, a tool that has passed its own manufacturer's test fails the customer's test, thus delaying implementation of the tool and overall fab production schedules. CCS Envoy can shorten this cycle and help get tools implemented more quickly by eliminating discrepancies between tool manufacturers' and end users' testing procedures. Analysis has shown that CCS Envoy can cut test times in half, and thus get tools accepted and into production faster.

"Meeting SEMI standards and reducing tool implementation and integration times are of concern to our industry because tool integration is often the primary reason a fab's opening is delayed. CCS test products are an important part of Brooks-PRI's strategy to provide semiconductor manufacturers and OEM tool suppliers with solutions for improving productivity and shortening time to market," said Jeff Cassis, senior vice president, FAB Systems Group of Brooks-PRI Automation.

"CCS test software is playing an important role in achieving a consensus on SEMI standards, which can be interpreted and tested differently from company to company," continued Cassis. "When a tool supplier and its customer are using the same tests, agreement around standards is increased, resulting in higher quality host communication interfaces and greater ease of integration between hardware and software products."

All twelve of the semiconductor manufacturers who are using communication interface test software have chosen Brooks-PRI's CCS Envoy. Six of those companies have included it in their tool specifications, thus requiring their OEM tool suppliers to test with CCS Envoy.

About Brooks-PRI Automation, Inc.
Brooks-PRI (NASDAQ: BRKS) delivers total automation. The company's hardware, software and services can manage every wafer, reticle and data movement in the fab, helping semiconductor manufacturers accelerate time-to-market while reducing their risk. Brooks-PRI products are used in virtually every fab in the world. For information, visit http://www.brooks-pri.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995: The foregoing discussion contains forward-looking statements related to future performance and speaks only of Brooks-PRI Automation, Inc.'s (the "Company") expectations as of the date of this press release. The forward-looking statements involve several known and unknown risks and uncertainties including, without limitation, risks relating to the expected benefits and synergies of the recent merger of PRI Automation Systems, Inc., into Brooks Automation, Inc., the continued success of the Company in the marketplace, the Company's ability to capitalize on PRI Automation's technology, the contribution of the acquired business to the Company's financial condition and performance, the ease of integrating PRI Automation into the Company, the Company's dependence on the cyclical semiconductor industry, the highly competitive nature and rapid technological change that characterize the industries in which the Company competes, and other risks and uncertainties described in the Company's reports and registration statements filed with the Securities and Exchange Commission. As a result, there can be no assurance that the Company's future results will not be materially different from those projected. The Company expressly disclaims any obligation or undertaking to release publicly any updates or revisions to any such statement to reflect any change in the Company's expectations or any change in events, conditions or circumstances on which any such statement is based.